Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules

Chao Wang, Sung Wook Nam, John M. Cotte, Christopher V. Jahnes, Evan G. Colgan, Robert L. Bruce, Markus Brink, Michael F. Lofaro, Jyotica V. Patel, Lynne M. Gignac, Eric A. Joseph, Satyavolu Papa Rao, Gustavo Stolovitzky, Stanislav Polonsky, Qinghuang Lin

Research output: Contribution to journalArticlepeer-review

42 Scopus citations


Wafer-scale fabrication of complex nanofluidic systems with integrated electronics is essential to realizing ubiquitous, compact, reliable, high-sensitivity and low-cost biomolecular sensors. Here we report a scalable fabrication strategy capable of producing nanofluidic chips with complex designs and down to single-digit nanometre dimensions over 200 mm wafer scale. Compatible with semiconductor industry standard complementary metal-oxide semiconductor logic circuit fabrication processes, this strategy extracts a patterned sacrificial silicon layer through hundreds of millions of nanoscale vent holes on each chip by gas-phase Xenon difluoride etching. Using single-molecule fluorescence imaging, we demonstrate these sacrificial nanofluidic chips can function to controllably and completely stretch lambda DNA in a two-dimensional nanofluidic network comprising channels and pillars. The flexible nanofluidic structure design, wafer-scale fabrication, single-digit nanometre channels, reliable fluidic sealing and low thermal budget make our strategy a potentially universal approach to integrating functional planar nanofluidic systems with logic circuits for lab-on-a-chip applications.

Original languageEnglish
Article number14243
JournalNature Communications
StatePublished - 23 Jan 2017
Externally publishedYes


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