@article{198d0833a2084660bcaf844d52af1ea3,
title = "Tip-based chemical vapor deposition with a scanning nano-heater",
abstract = "In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublimated copper acetylacetonate (Cu(acac)2), argon (Ar), and oxygen (O2), is demonstrated. This technique is applicable to other materials.",
author = "Angelo Gaitas",
note = "Funding Information: The author thanks G. Lahann for consulting help in determining MO-CVD chemistry, E. Gulari for reviewing the results, T. Li and W. Zhu for help with the set-up and the micro-heater fabrication, Y. Gianchandani, A. Basu, B. Mitra, and B. DasGupta for their advice and support. The micro-heaters were fabricated and the samples were analyzed at the Lurie Nanofabrication Facility of the University of Michigan, Ann Arbor. The work was supported by the National Science Foundation (SBIR/SECO Grant No. 1128475).",
year = "2013",
month = apr,
day = "1",
doi = "10.1063/1.4799654",
language = "English",
volume = "102",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "13",
}