The structure and tribological behaviors of CrN and Cr-Ti-N coatings

G. A. Zhang, P. X. Yan, P. Wang, Y. M. Chen, J. Y. Zhang

Research output: Contribution to journalArticlepeer-review

63 Scopus citations

Abstract

The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.

Original languageEnglish
Pages (from-to)7353-7359
Number of pages7
JournalApplied Surface Science
Volume253
Issue number18
DOIs
StatePublished - 15 Jul 2007
Externally publishedYes

Keywords

  • Cr-Ti-N coatings
  • Magnetron sputtering
  • Structure
  • Tribological properties

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