The structure and tribological behaviors of CrN and Cr-Ti-N coatings

G. A. Zhang; P. X. Yan; P. Wang; Y. M. Chen; J. Y. Zhang

doi:10.1016/j.apsusc.2007.02.061

The structure and tribological behaviors of CrN and Cr-Ti-N coatings

G. A. Zhang, P. X. Yan, P. Wang, Y. M. Chen, J. Y. Zhang

Research output: Contribution to journal › Article › peer-review

62 Scopus citations

Abstract

The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.

Original language	English
Pages (from-to)	7353-7359
Number of pages	7
Journal	Applied Surface Science
Volume	253
Issue number	18
DOIs	https://doi.org/10.1016/j.apsusc.2007.02.061
State	Published - 15 Jul 2007
Externally published	Yes

Keywords

Cr-Ti-N coatings
Magnetron sputtering
Structure
Tribological properties

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10.1016/j.apsusc.2007.02.061

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title = "The structure and tribological behaviors of CrN and Cr-Ti-N coatings",

abstract = "The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.",

keywords = "Cr-Ti-N coatings, Magnetron sputtering, Structure, Tribological properties",

author = "Zhang, {G. A.} and Yan, {P. X.} and P. Wang and Chen, {Y. M.} and Zhang, {J. Y.}",

note = "Funding Information: The authors are grateful to the Natural Science Foundation of China (Grant nos. 50323007 and 50572108), the Innovative Group Foundation from NSFC (Grant no. 50421502) and the “Hundreds Talent Program” of the Chinese Academy of Science for financial support.",

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AU - Zhang, G. A.

AU - Yan, P. X.

AU - Wang, P.

AU - Chen, Y. M.

AU - Zhang, J. Y.

N1 - Funding Information: The authors are grateful to the Natural Science Foundation of China (Grant nos. 50323007 and 50572108), the Innovative Group Foundation from NSFC (Grant no. 50421502) and the “Hundreds Talent Program” of the Chinese Academy of Science for financial support.

PY - 2007/7/15

Y1 - 2007/7/15

N2 - The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.

AB - The Cr-Ti-N coatings with different composition were deposited in a medium frequency magnetron sputtering system on Si (1 1 1) substrates. The structures, surface morphology and wear properties were measured. The binary CrN coatings, formed a single-phase fcc structure with nearly random (1 1 1), (2 0 0) and (2 2 0) orientation, while for the Ti was introduced, coatings show a preferred orientation of (2 0 0). Cr-Ti-N coating shows a much smoother surface than CrN coating. Cr-Ti-N coating with 31.75% Ti content shows the best wear behavior. The excellent tribological properties of this composition coating are corresponding to the solid solution nitride structures.

KW - Cr-Ti-N coatings

KW - Magnetron sputtering

KW - Structure

KW - Tribological properties

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SP - 7353

EP - 7359

JO - Applied Surface Science

JF - Applied Surface Science

IS - 18

ER -

The structure and tribological behaviors of CrN and Cr-Ti-N coatings

Abstract

Keywords

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