The preparation and mechanical properties of Al-containing a-C: HHHH thin films

Keyphrases

• Mechanical Properties 100%
• Hydrogenated Amorphous Carbon Film 100%
• Friction Coefficient 66%
• Gas Mixture 33%
• X-ray Photoelectron Spectroscopy 33%
• Low Friction Coefficient 33%
• High Friction 33%
• Surface Morphology 33%
• Methane Gas 33%
• High Hardness 33%
• Silicon Substrate 33%
• Wear Resistance 33%
• Argon Gas 33%
• Mid-frequency Magnetron Sputtering 33%
• Tribological Tester 33%
• Low Hardness 33%
• Surface Friction 33%
• Atomic Force Microscopy Nanoindentation 33%
• Low Surface Roughness 33%
• Alloy Target 33%
• Al Film 33%
• Resistance Film 33%
• High Surface Roughness 33%
• Surface Hardness 33%

Material Science

• Film 100%
• Thin Films 100%
• Carbon Films 75%
• Surface Roughness 50%
• Photoemission Spectroscopy 25%
• Silicon 25%
• Nanoindentation 25%
• Surface Morphology 25%
• Wear Resistance 25%
• Coefficient of Friction 25%
• Magnetron Sputtering 25%
• Gas Mixture 25%
• Atomic Force Microscopy 25%