TY - JOUR
T1 - Superlow friction of titanium/silicon codoped hydrogenated amorphous carbon film in the ambient air
AU - Jiang, Jinlong
AU - Hao, Junying
AU - Wang, Peng
AU - Liu, Weimin
N1 - Funding Information:
We thank Z. Lin of the State Key Laboratory for Advanced Metals and Materials, University of Science and Technology Beijing for nanoindentation tests. This work has been supported by the Natural Science Foundation of China (Grant Nos. 50905177 and 509052133) and 973 Project (Grant No. 2007CB607601) of the Ministry of Science and Technology of China.
PY - 2010/8/1
Y1 - 2010/8/1
N2 - Titanium/silicon codoped hydrogenated carbon film was deposited on the n-Si (100) substrates by reactive magnetron sputtering Ti80Si20 target in a mixture of argon and methane. Microstructure of the film was investigated using x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, Raman spectroscopy, and attenuated total reflectance Fourier transform infrared spectroscopy. The investigations have revealed that the film has an amorphous structure and consists of high sp2 hybridized carbon atoms and bonding hydrogen atoms. The mechanical and tribological properties were evaluated using a nanoindentor and a ball-on-disk tribometer, respectively. The film exhibits hardness of 9.6 GPa, high elastic recovery of 73.0% and high H/E ratio of 0.156. Most significant, the superlow friction (μ<0.01) and special low wear rate (2.4× 10-7 mm3 N-1 m-1) was observed in ambient air with 40% relative humidity. Combining the results of scanning electron microscopy and Raman analyses of the worn surface, it is concluded that some mechanisms, e.g., transfer films, friction-induced graphitization, hydrogen-terminated carbon surface, tribochemical reaction, etc., could be together responsible for this superlow friction in the ambient air.
AB - Titanium/silicon codoped hydrogenated carbon film was deposited on the n-Si (100) substrates by reactive magnetron sputtering Ti80Si20 target in a mixture of argon and methane. Microstructure of the film was investigated using x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, Raman spectroscopy, and attenuated total reflectance Fourier transform infrared spectroscopy. The investigations have revealed that the film has an amorphous structure and consists of high sp2 hybridized carbon atoms and bonding hydrogen atoms. The mechanical and tribological properties were evaluated using a nanoindentor and a ball-on-disk tribometer, respectively. The film exhibits hardness of 9.6 GPa, high elastic recovery of 73.0% and high H/E ratio of 0.156. Most significant, the superlow friction (μ<0.01) and special low wear rate (2.4× 10-7 mm3 N-1 m-1) was observed in ambient air with 40% relative humidity. Combining the results of scanning electron microscopy and Raman analyses of the worn surface, it is concluded that some mechanisms, e.g., transfer films, friction-induced graphitization, hydrogen-terminated carbon surface, tribochemical reaction, etc., could be together responsible for this superlow friction in the ambient air.
UR - http://www.scopus.com/inward/record.url?scp=77955893775&partnerID=8YFLogxK
U2 - 10.1063/1.3462469
DO - 10.1063/1.3462469
M3 - Article
AN - SCOPUS:77955893775
SN - 0021-8979
VL - 108
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 3
M1 - 033510
ER -