SOI formation from amorphous silicon by novel grain enhancement method

  • C. Y. Yuen
  • , M. C. Poon
  • , M. Chan
  • , M. Qin
  • , W. Y. Chan
  • , S. Shivani
  • , P. K. Ko

Research output: Contribution to journal › Conference article › peer-review

Fingerprint

Dive into the research topics of 'SOI formation from amorphous silicon by novel grain enhancement method'. Together they form a unique fingerprint.
Sort by

Keyphrases

Material Science

Engineering

Earth and Planetary Sciences