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SOI formation from amorphous silicon by metal-induced-lateral-crystallization (MILC) and subsequent high temperature annealing
Singh Jagar, Mansun Chan, M. C. Poon, Hongmei Wang, Ming Qin, Singla Shivani, Ping K. Ko, Yangyuan Wang
Research output: Contribution to conference › Paper › peer-review
4
Scopus
citations