SOI formation from amorphous silicon by metal-induced-lateral-crystallization (MILC) and subsequent high temperature annealing

Singh Jagar, Mansun Chan, M. C. Poon, Hongmei Wang, Ming Qin, Singla Shivani, Ping K. Ko, Yangyuan Wang

Research output: Contribution to conferencePaperpeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'SOI formation from amorphous silicon by metal-induced-lateral-crystallization (MILC) and subsequent high temperature annealing'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds