A new type of flexible carbon composite film was fabricated on a polyimide substrate using nano carbon particles as the conductive matrix and PbO and SiO2 as the insulator was developed for use in a flexible force sensor. Metal electrodes and leads were attached using MEMS technology. Tests show that the electrical resistance of the flexible carbon composite film experiences large changes as the normal strain changes in the range of 0-1 MPa, with an approximately linear piezoresistive variation and high thermal stability in the range of 0-0.7 MPa. The pressure-sensitive film can be fit to any surface shape so it can be widely applied to various squeeze stress measurements on any regular and irregular curved surfaces.
|Number of pages||3|
|Journal||Qinghua Daxue Xuebao/Journal of Tsinghua University|
|State||Published - Nov 2003|
- Carbon composite film
- Squeeze stress