Abstract
Porous silicon (Si) has many novel and unique properties. Design and fabrication of porous Si (PS) devices are also fully compatible with the nature monolithic Si very-large-scale-integrated technologies. This paper presents the results on the fabrication and characterization of a novel high-performance PS-based ethanol vapor sensor. The many applications of ethanol are also presented.
Original language | English |
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Pages | 13-14 |
Number of pages | 2 |
State | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1996 3rd IEEE Hong Kong Electron Devices Meeting - Hong Kong, Hong Kong Duration: 29 Jun 1996 → 29 Jun 1996 |
Conference
Conference | Proceedings of the 1996 3rd IEEE Hong Kong Electron Devices Meeting |
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City | Hong Kong, Hong Kong |
Period | 29/06/96 → 29/06/96 |