Porous silicon ethanol vapor sensor

Y. C. Bow, W. M. Kwok, M. C. Poon

Research output: Contribution to conferencePaperpeer-review

2 Scopus citations

Abstract

Porous silicon (Si) has many novel and unique properties. Design and fabrication of porous Si (PS) devices are also fully compatible with the nature monolithic Si very-large-scale-integrated technologies. This paper presents the results on the fabrication and characterization of a novel high-performance PS-based ethanol vapor sensor. The many applications of ethanol are also presented.

Original languageEnglish
Pages13-14
Number of pages2
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1996 3rd IEEE Hong Kong Electron Devices Meeting - Hong Kong, Hong Kong
Duration: 29 Jun 199629 Jun 1996

Conference

ConferenceProceedings of the 1996 3rd IEEE Hong Kong Electron Devices Meeting
CityHong Kong, Hong Kong
Period29/06/9629/06/96

Fingerprint

Dive into the research topics of 'Porous silicon ethanol vapor sensor'. Together they form a unique fingerprint.

Cite this