TY - JOUR
T1 - Piezoresistive probe array for high throughput applications
AU - Gaitas, Angelo
AU - French, Paddy
N1 - Funding Information:
The authors thank Dr. Weibin Zhu for help with device fabrication and Dr. Tao Li for consulting. We thank Prof. Yogesh Gianchandani and Dr. Cheryl Albus for their advice and support. This work was supported by the National Science Foundation (Award No. 0822810) (A.G.).
PY - 2011
Y1 - 2011
N2 - Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, piezoresistive deflection-sensing elements are integrated onto micromachined cantilevers to increase sensitivity, and reduce complexity and cost. An array of probes with 5nm gold ultrathin film sensors on silicon substrates for high throughput scanning probe microscopy is developed. The gauge factor of the piezoresistive sensor is 3.16 ± 0.05 and the deflection sensitivity is 0.2 ppm/nm. Plots of the change in resistance of the sensing element with displacement are used to calibrate the probes and determine probe contact with the substrate. Topographical scans demonstrate high throughput and nanometer resolution.
AB - Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, piezoresistive deflection-sensing elements are integrated onto micromachined cantilevers to increase sensitivity, and reduce complexity and cost. An array of probes with 5nm gold ultrathin film sensors on silicon substrates for high throughput scanning probe microscopy is developed. The gauge factor of the piezoresistive sensor is 3.16 ± 0.05 and the deflection sensitivity is 0.2 ppm/nm. Plots of the change in resistance of the sensing element with displacement are used to calibrate the probes and determine probe contact with the substrate. Topographical scans demonstrate high throughput and nanometer resolution.
KW - Atomic force microscope
KW - Microcantilevers
KW - Parallel imaging
KW - Piezoresistive sensing
KW - Scanning probe array
UR - https://www.scopus.com/pages/publications/84857167316
U2 - 10.1016/j.proeng.2011.12.357
DO - 10.1016/j.proeng.2011.12.357
M3 - Conference article
AN - SCOPUS:84857167316
SN - 1877-7058
VL - 25
SP - 1445
EP - 1448
JO - Procedia Engineering
JF - Procedia Engineering
T2 - 25th Eurosensors Conference
Y2 - 4 September 2011 through 7 September 2011
ER -