TY - GEN
T1 - Optimal wet-furnace machine allocation for daily fab production
AU - Wang, Simon
AU - Wang, Fenix
AU - Chang, Joey
AU - Ju-Yin Chang, Chang
AU - Shi-Chung Chang, Chang
AU - Peng Wang, Wang
AU - Luh, Peter B.
AU - Yu-Ting Kao, Kao
AU - Shun-Cheng Zhan, Zhan
PY - 2010
Y1 - 2010
N2 - This paper presents the design of an efficient and near-optimal machine allocation method for wet bench and furnace machine groups to achieve daily production targets and high moves. The core of the method consists of an innovative integer linear programming problem formulation of the complex operation constraints such as variable size batching, queue time, cross fab transportation and linearization of the objective function, and the skillful application of an optimization tool suite. Test results over real fab data clearly demonstrated the superiority of the method than a currently practiced heuristic in bottleneck (furnace) machine utilization (potentially by 10-15%) and it leads to nearly 50% reduction in average total waiting time per FOUP. Its computation efficiency (in seconds) indicates a strong potential for both solving larger sized problems and extensions to dynamic allocations.
AB - This paper presents the design of an efficient and near-optimal machine allocation method for wet bench and furnace machine groups to achieve daily production targets and high moves. The core of the method consists of an innovative integer linear programming problem formulation of the complex operation constraints such as variable size batching, queue time, cross fab transportation and linearization of the objective function, and the skillful application of an optimization tool suite. Test results over real fab data clearly demonstrated the superiority of the method than a currently practiced heuristic in bottleneck (furnace) machine utilization (potentially by 10-15%) and it leads to nearly 50% reduction in average total waiting time per FOUP. Its computation efficiency (in seconds) indicates a strong potential for both solving larger sized problems and extensions to dynamic allocations.
UR - https://www.scopus.com/pages/publications/79956143462
M3 - Conference contribution
AN - SCOPUS:79956143462
SN - 9781457703928
T3 - IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
BT - 2010 International Symposium on Semiconductor Manufacturing, ISSM 2010
T2 - 18th International Symposium on Semiconductor Manufacturing, ISSM 2010
Y2 - 18 October 2010 through 20 October 2010
ER -