On-chip hot spot remediation with miniaturized thermoelectric coolers

The rapid emergence of nanoelectronics, with the consequent rise in transistor density and switching speed, has led to a steep increase in chip heat flux and growing concern over the emergence of on-chip "hot spots" in microprocessors, along with such high flux regions in power electronic chips and LED's. Miniaturized thermoelectric coolers (μ-TEC's) are a most promising cooling technique for the remediation of such hot spots. This paper presents a comprehensive review of recent advances in novel applications of superlattice, mini-contact, and silicon-based miniaturized thermoelectric coolers in reducing the severity of on-chip hot spots.