Abstract
A small planar inductance coil is a sensitive non-contact device whose measurements are based on the near-field eddy current. The coil can be used for nondestructive measurements of displacements or distances between very small surfaces, such as in micro-electro-mechanical systems. The relationship between the near-field eddy current and the free inductance and impedance of the coil was modeled based on axially symmetric time-harmonic electromagnetic theory. The coil was also tested experimentally. The model results agree well with the experimental data verifying that the model can be used for the design of small planar coil eddy current sensors.
| Original language | English |
|---|---|
| Pages (from-to) | 680-683 |
| Number of pages | 4 |
| Journal | Qinghua Daxue Xuebao/Journal of Tsinghua University |
| Volume | 49 |
| Issue number | 5 |
| State | Published - May 2009 |
| Externally published | Yes |
Keywords
- Eddy current
- Electromagnetic
- Mathematic model
- Planar inductance coil