Molecular Glass Photoresists with High Resolution, Low LER, and High Sensitivity for EUV Lithography

Xiaoman Peng, Yafei Wang, Jian Xu, Hua Yuan, Liangqian Wang, Tao Zhang, Xudong Guo, Shuangqing Wang, Yi Li, Guoqiang Yang

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

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Keyphrases

Engineering

Medicine and Dentistry

Chemistry

Material Science