Investigation of the strain relaxation and ageing effect of YBa 2Cu3O7-δ thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers

P. Wang; J. Li; W. Peng; Y. F. Chen; D. N. Zheng

doi:10.1088/0953-2048/19/1/009

Investigation of the strain relaxation and ageing effect of YBa ₂Cu₃O_7-δ thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers

P. Wang
, J. Li
, W. Peng
, Y. F. Chen
, D. N. Zheng

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

The integration of high-temperature superconductors into advanced semiconductor technology is rather intriguing in the microelectronics field. In this paper, we report on YBa₂Cu₃O_7-δ (YBCO) thin films deposited on silicon-on-insulator (SOI) substrates buffered by yttria-stabilized zirconia (YSZ) layers using the in situ pulsed laser deposition (PLD) technique. The strain in the YBCO films and the ageing effect caused by the thermally induced cracks are carefully studied. It is believed that because of the adoption of the SOI substrate, the strain in the YBCO films is greatly relaxed and the quality and stability of YBCO films are rather good, which is advantageous to the superconductive devices.

Original language	English
Pages (from-to)	51-56
Number of pages	6
Journal	Superconductor Science and Technology
Volume	19
Issue number	1
DOIs	https://doi.org/10.1088/0953-2048/19/1/009
State	Published - 1 Jan 2006
Externally published	Yes

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abstract = "The integration of high-temperature superconductors into advanced semiconductor technology is rather intriguing in the microelectronics field. In this paper, we report on YBa2Cu3O7-δ (YBCO) thin films deposited on silicon-on-insulator (SOI) substrates buffered by yttria-stabilized zirconia (YSZ) layers using the in situ pulsed laser deposition (PLD) technique. The strain in the YBCO films and the ageing effect caused by the thermally induced cracks are carefully studied. It is believed that because of the adoption of the SOI substrate, the strain in the YBCO films is greatly relaxed and the quality and stability of YBCO films are rather good, which is advantageous to the superconductive devices.",

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AU - Li, J.

AU - Peng, W.

AU - Chen, Y. F.

AU - Zheng, D. N.

PY - 2006/1/1

Y1 - 2006/1/1

N2 - The integration of high-temperature superconductors into advanced semiconductor technology is rather intriguing in the microelectronics field. In this paper, we report on YBa2Cu3O7-δ (YBCO) thin films deposited on silicon-on-insulator (SOI) substrates buffered by yttria-stabilized zirconia (YSZ) layers using the in situ pulsed laser deposition (PLD) technique. The strain in the YBCO films and the ageing effect caused by the thermally induced cracks are carefully studied. It is believed that because of the adoption of the SOI substrate, the strain in the YBCO films is greatly relaxed and the quality and stability of YBCO films are rather good, which is advantageous to the superconductive devices.

AB - The integration of high-temperature superconductors into advanced semiconductor technology is rather intriguing in the microelectronics field. In this paper, we report on YBa2Cu3O7-δ (YBCO) thin films deposited on silicon-on-insulator (SOI) substrates buffered by yttria-stabilized zirconia (YSZ) layers using the in situ pulsed laser deposition (PLD) technique. The strain in the YBCO films and the ageing effect caused by the thermally induced cracks are carefully studied. It is believed that because of the adoption of the SOI substrate, the strain in the YBCO films is greatly relaxed and the quality and stability of YBCO films are rather good, which is advantageous to the superconductive devices.

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Investigation of the strain relaxation and ageing effect of YBa 2Cu3O7-δ thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers

Abstract

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Investigation of the strain relaxation and ageing effect of YBa ₂Cu₃O_7-δ thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers