Interface bonding structure of hafnium oxide prepared by direct sputtering of hafnium in oxygen

Hei Wong, K. L. Ng, Nian Zhan, M. C. Poon, C. W. Kok

Research output: Contribution to journalArticlepeer-review

66 Scopus citations
Original languageEnglish
Pages (from-to)1094-1100
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number3
DOIs
StatePublished - 2004
Externally publishedYes

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