Original language | English |
---|---|
Pages (from-to) | 1094-1100 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 22 |
Issue number | 3 |
DOIs | |
State | Published - 2004 |
Externally published | Yes |
Interface bonding structure of hafnium oxide prepared by direct sputtering of hafnium in oxygen
Hei Wong, K. L. Ng, Nian Zhan, M. C. Poon, C. W. Kok
Research output: Contribution to journal › Article › peer-review
66
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citations