High-resolution integrated piezoresistive sensors for microfluidic monitoring

Yongxiao Zhou; Erik M. Werner; Eugene Lee; Michael Chu; Thao Nguyen; Kevin D. Costa; Elliot E. Hui; Michelle Khine

doi:10.1039/d0lc01046d

High-resolution integrated piezoresistive sensors for microfluidic monitoring

Yongxiao Zhou, Erik M. Werner, Eugene Lee, Michael Chu, Thao Nguyen, Kevin D. Costa, Elliot E. Hui, Michelle Khine

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Microfluidic devices are traditionally monitored by bulky and expensive off-chip sensors. We have developed a soft piezoresistive sensor capable of measuring micron-level strains that can be easily integrated into devices via soft lithography. We apply this sensor to achieve fast and localized monitoring of pressure, flow, and valve actuation.

Original language	English
Pages (from-to)	83-92
Number of pages	10
Journal	Lab on a Chip
Volume	21
Issue number	1
DOIs	https://doi.org/10.1039/d0lc01046d
State	Published - 7 Jan 2021

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title = "High-resolution integrated piezoresistive sensors for microfluidic monitoring",

abstract = "Microfluidic devices are traditionally monitored by bulky and expensive off-chip sensors. We have developed a soft piezoresistive sensor capable of measuring micron-level strains that can be easily integrated into devices via soft lithography. We apply this sensor to achieve fast and localized monitoring of pressure, flow, and valve actuation.",

author = "Yongxiao Zhou and Werner, {Erik M.} and Eugene Lee and Michael Chu and Thao Nguyen and Costa, {Kevin D.} and Hui, {Elliot E.} and Michelle Khine",

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AU - Zhou, Yongxiao

AU - Werner, Erik M.

AU - Lee, Eugene

AU - Chu, Michael

AU - Nguyen, Thao

AU - Costa, Kevin D.

AU - Hui, Elliot E.

AU - Khine, Michelle

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AB - Microfluidic devices are traditionally monitored by bulky and expensive off-chip sensors. We have developed a soft piezoresistive sensor capable of measuring micron-level strains that can be easily integrated into devices via soft lithography. We apply this sensor to achieve fast and localized monitoring of pressure, flow, and valve actuation.

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EP - 92

JO - Lab on a Chip

JF - Lab on a Chip

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High-resolution integrated piezoresistive sensors for microfluidic monitoring

Abstract

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