High-resolution integrated piezoresistive sensors for microfluidic monitoring

Yongxiao Zhou, Erik M. Werner, Eugene Lee, Michael Chu, Thao Nguyen, Kevin D. Costa, Elliot E. Hui, Michelle Khine

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Microfluidic devices are traditionally monitored by bulky and expensive off-chip sensors. We have developed a soft piezoresistive sensor capable of measuring micron-level strains that can be easily integrated into devices via soft lithography. We apply this sensor to achieve fast and localized monitoring of pressure, flow, and valve actuation.

Original languageEnglish
Pages (from-to)83-92
Number of pages10
JournalLab on a Chip
Volume21
Issue number1
DOIs
StatePublished - 7 Jan 2021

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