Effects of rapid thermal annealing on the interface and oxide trap distributions in hafnium oxide films

Nian Zhan, K. L. Ng, Hei Wong, M. C. Poon, C. W. Kok

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

11 Scopus citations

Fingerprint

Dive into the research topics of 'Effects of rapid thermal annealing on the interface and oxide trap distributions in hafnium oxide films'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering