Effects of grain boundaries on TFTs formed by high-temperature MILC

Zhikuan Zhang; Hongmei Wang; Mansun Chan; Singh Jagar; M. C. Poon; Ming Qin; Yangyuan Wang

Effects of grain boundaries on TFTs formed by high-temperature MILC

Zhikuan Zhang, Hongmei Wang, Mansun Chan, Singh Jagar, M. C. Poon, Ming Qin, Yangyuan Wang

Research output: Contribution to conference › Paper › peer-review

1 Scopus citations

Abstract

The effects of grain boundaries on the performance of super TFTs formed by MILC are studied. The existence of grain boundaries in the channel region will cause subthreshold hump, early punchthrough or device degradation, depending on the direction of the grain boundaries. The probability for the channel region of a TFT to cover multiple grains decrease significantly when the device is scaled down, thus resulting in better device performance and higher uniformity. A novel method to measure the grain dimension by using boundaries oxide as a etching mask has also been developed.

Original language	English
Pages	68-71
Number of pages	4
State	Published - 2000
Externally published	Yes

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title = "Effects of grain boundaries on TFTs formed by high-temperature MILC",

abstract = "The effects of grain boundaries on the performance of super TFTs formed by MILC are studied. The existence of grain boundaries in the channel region will cause subthreshold hump, early punchthrough or device degradation, depending on the direction of the grain boundaries. The probability for the channel region of a TFT to cover multiple grains decrease significantly when the device is scaled down, thus resulting in better device performance and higher uniformity. A novel method to measure the grain dimension by using boundaries oxide as a etching mask has also been developed.",

author = "Zhikuan Zhang and Hongmei Wang and Mansun Chan and Singh Jagar and Poon, {M. C.} and Ming Qin and Yangyuan Wang",

year = "2000",

language = "English",

pages = "68--71",

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TY - CONF

T1 - Effects of grain boundaries on TFTs formed by high-temperature MILC

AU - Zhang, Zhikuan

AU - Wang, Hongmei

AU - Chan, Mansun

AU - Jagar, Singh

AU - Poon, M. C.

AU - Qin, Ming

AU - Wang, Yangyuan

PY - 2000

Y1 - 2000

N2 - The effects of grain boundaries on the performance of super TFTs formed by MILC are studied. The existence of grain boundaries in the channel region will cause subthreshold hump, early punchthrough or device degradation, depending on the direction of the grain boundaries. The probability for the channel region of a TFT to cover multiple grains decrease significantly when the device is scaled down, thus resulting in better device performance and higher uniformity. A novel method to measure the grain dimension by using boundaries oxide as a etching mask has also been developed.

AB - The effects of grain boundaries on the performance of super TFTs formed by MILC are studied. The existence of grain boundaries in the channel region will cause subthreshold hump, early punchthrough or device degradation, depending on the direction of the grain boundaries. The probability for the channel region of a TFT to cover multiple grains decrease significantly when the device is scaled down, thus resulting in better device performance and higher uniformity. A novel method to measure the grain dimension by using boundaries oxide as a etching mask has also been developed.

UR - http://www.scopus.com/inward/record.url?scp=0034482350&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0034482350

SP - 68

EP - 71

ER -

Effects of grain boundaries on TFTs formed by high-temperature MILC

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