Double-swing method used for polishing off-axis aspherical mirrors

Peng Wang, Jun Feng Li, Bina Xuan, Xiao Ping Chen, Shu Mei Song, Ya Chen, Jing Jiang Xie

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Based on the characteristics of off-axis aspherical surface, a new method used for polishing off-axis aspherical mirrors-Double-Swing Method (DSM) is proposed in this paper, and the polishing mechanism of DSM is introduced. The mathematical model of the DSM with steady movement state is established.The movement of this mathematical model is simulated in a programming language; the comparison of simulation effects under different parameters is made. In order to achieve optimal parameters, a high order off-axis rectangle aspherical mirror has been polished by DSM. The final result of profile measurements of 12nm, RMS is achieved. The result indicates that the method is of practice and has even higher working efficiency and precision.

Original languageEnglish
Title of host publication4th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationAdvanced Optical Manufacturing Technologies
DOIs
StatePublished - 2009
Externally publishedYes
Event4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Chengdu, China
Duration: 19 Nov 200821 Nov 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7282
ISSN (Print)0277-786X

Conference

Conference4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Country/TerritoryChina
CityChengdu
Period19/11/0821/11/08

Keywords

  • Double-swing method
  • Manufacture
  • Motion parameters
  • Off-axis aspheric

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