Direct electrical characterization of metal- induced-lateral-crystallization regions by spreading resistance probe measurements

T. C. Leung, C. F. Cheng, A. M. Myasnikov, M. C. Poon

Research output: Contribution to conferencePaperpeer-review

Abstract

Spreading resistance probe (SRP) measurement has been used to directly study the electrical characteristics of MILC poly silicon film. The measurement requires only small regions (∼100μm × 100μm) and the results have shown the improvement of the quality of resistance after a low temperature (625°C) and short time (1 hour) annealing. The new method can provide a fast, simple and inexpensive electrical characterization method instead of fabrication of devices such as resistor and transistors.

Original languageEnglish
Pages144-147
Number of pages4
StatePublished - 2001
Externally publishedYes
Event2001 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China
Duration: 30 Jun 2001 → …

Conference

Conference2001 IEEE Hong Kong Electron Devices Meeting
Country/TerritoryChina
CityHong Kong
Period30/06/01 → …

Keywords

  • MILC
  • SRP

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