Abstract
Spreading resistance probe (SRP) measurement has been used to directly study the electrical characteristics of MILC poly silicon film. The measurement requires only small regions (∼100μm × 100μm) and the results have shown the improvement of the quality of resistance after a low temperature (625°C) and short time (1 hour) annealing. The new method can provide a fast, simple and inexpensive electrical characterization method instead of fabrication of devices such as resistor and transistors.
Original language | English |
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Pages | 144-147 |
Number of pages | 4 |
State | Published - 2001 |
Externally published | Yes |
Event | 2001 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China Duration: 30 Jun 2001 → … |
Conference
Conference | 2001 IEEE Hong Kong Electron Devices Meeting |
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Country/Territory | China |
City | Hong Kong |
Period | 30/06/01 → … |
Keywords
- MILC
- SRP