Spreading resistance probe (SRP) measurement has been used to directly study the electrical characteristics of MILC poly silicon film. The measurement requires only small regions (∼100μm × 100μm) and the results have shown the improvement of the quality of resistance after a low temperature (625°C) and short time (1 hour) annealing. The new method can provide a fast, simple and inexpensive electrical characterization method instead of fabrication of devices such as resistor and transistors.
|Number of pages||4|
|State||Published - 2001|
|Event||2001 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China|
Duration: 30 Jun 2001 → …
|Conference||2001 IEEE Hong Kong Electron Devices Meeting|
|Period||30/06/01 → …|