Design and calibration method for microvision three-dimensional laser scanner

Changku Sun; Bin Liu; Peng Wang

doi:10.1116/1.3081982

Design and calibration method for microvision three-dimensional laser scanner

Changku Sun
, Bin Liu
, Peng Wang

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A microvision three-dimensional (3D) laser scanner with micron accuracy and the calibration method are presented in this article. The system is designed to measure and reconstruct the 3D shape of miniature objects. A new two-step calibration method is proposed to reduce measurement errors and improve the measurement precision. Repeated measurements show that the repeatability is better than ±1 μm. Moreover, the system has been successfully applied to extracting the height of solder pastes, which is beneficial in surface mount technology quality control.

Original language	English
Pages (from-to)	1315-1318
Number of pages	4
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	27
Issue number	3
DOIs	https://doi.org/10.1116/1.3081982
State	Published - 2009
Externally published	Yes

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abstract = "A microvision three-dimensional (3D) laser scanner with micron accuracy and the calibration method are presented in this article. The system is designed to measure and reconstruct the 3D shape of miniature objects. A new two-step calibration method is proposed to reduce measurement errors and improve the measurement precision. Repeated measurements show that the repeatability is better than ±1 μm. Moreover, the system has been successfully applied to extracting the height of solder pastes, which is beneficial in surface mount technology quality control.",

author = "Changku Sun and Bin Liu and Peng Wang",

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AU - Liu, Bin

AU - Wang, Peng

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PY - 2009

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AB - A microvision three-dimensional (3D) laser scanner with micron accuracy and the calibration method are presented in this article. The system is designed to measure and reconstruct the 3D shape of miniature objects. A new two-step calibration method is proposed to reduce measurement errors and improve the measurement precision. Repeated measurements show that the repeatability is better than ±1 μm. Moreover, the system has been successfully applied to extracting the height of solder pastes, which is beneficial in surface mount technology quality control.

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Design and calibration method for microvision three-dimensional laser scanner

Abstract

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