A preliminary study of spatial resolution enhancement of confocal and triangulation displacement meters using contact mode scanning probes

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Abstract

This paper presents a method for the spatial resolution enhancement of confocal and triangulation meters using cantilever probes. Integration of a cantilever with existing commercially available meters is substantially eased by the absence of feedback control of the cantilever position. Confocal and triangulation meters are used for a number of applications in research and industrial settings including thickness measurements, topography measurements, step height measurements, flatness measurements, and profile measurements. These instruments provide a vertical (out-of-plane) resolution of a few nanometers. However, they are limited in their spatial resolution to the laser beam diameter, which is typically larger than 2 μm and often about 20 μm. Using a cantilever probe to make contact with the sample, the lateral resolution of standard commercial instruments can be improved to less than 1 μm.

Original languageEnglish
Article number023703
JournalReview of Scientific Instruments
Volume79
Issue number2
DOIs
StatePublished - 2008
Externally publishedYes

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