@inproceedings{85321efd755b418c8c2d6976334ec37f,
title = "A new method for testing resistivity distribution of semiconductor wafer",
abstract = "Electrical Impedance tomography (EIT) is a new direction of medical imaging technology. A new method is described for testing resistivity distribution of semiconductor wafer using EIT algorithm. There are two parts of the whole system, one is for data collection and the other is for image reconstruction. The data collection system mainly includes multiplexers, precision constant current source and analog to digital converter circuit. The system can transmits collected data to the computer for next step that is image reconstruction. System has the characteristics of fast and using a variety of collection methods. Finally, this paper briefly introduces a new method for image rebuild with BP neural network and the measurement results are discussed.",
keywords = "AD convert, BP neural network, Data collection, Electrical impedance tomography, Semiconductor resistivity",
author = "Peng Wang and Yicai Sun and Lili Xie",
year = "2009",
language = "English",
isbn = "9781846260612",
series = "Proceedings of the 2nd International Conference on Modelling and Simulation, ICMS2009",
pages = "407--412",
booktitle = "Proceedings of the 2nd International Conference on Modelling and Simulation, ICMS2009",
note = "2009 Joint International Conference on Modelling and Simulation ; Conference date: 21-05-2009 Through 22-05-2009",
}